发明申请
- 专利标题： MEMS Switch
- 专利标题（中）： MEMS开关
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申请号： US14262188申请日： 2014-04-25
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公开(公告)号： US20150311003A1公开(公告)日： 2015-10-29
- 发明人: Padraig L. Fitzgerald , Jo-ey Wong , Raymond C. Goggin , Bernard P. Stenson , Paul Lambkin , Mark Schirmer
- 申请人： Analog Devices Global
- 主分类号： H01H1/00
- IPC分类号： H01H1/00 ; B81B3/00 ; H01H59/00
摘要：
Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.
公开/授权文献
- US09748048B2 MEMS switch 公开/授权日：2017-08-29