Invention Application
- Patent Title: CONTACT AND SOLDER BALL INTERCONNECT
- Patent Title (中): 联系和焊接球互连
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Application No.: US14260399Application Date: 2014-04-24
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Publication No.: US20150311170A1Publication Date: 2015-10-29
- Inventor: Charles L. Arvin , Eric D. Perfecto , Wolfgang Sauter
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A semiconductor device fabrication method includes forming a barrier layer upon a dielectric layer, forming a pillar interconnect structure upon the barrier layer, forming solder upon the pillar interconnect structure, reflowing the solder to release solder voids, forming a perimeter material around at least a portion of an exposed sidewall of the pillar, and removing the barrier layer exterior to the pillar interconnect structure. Another fabrication method includes forming the barrier layer, forming the pillar interconnect structure, forming the solder upon the pillar interconnect structure, forming a perimeter material on exposed surfaces of the pillar interconnect structure, and removing the barrier layer on the surface of the dielectric layer exterior to the pillar interconnect structure. Another fabrication method includes forming the barrier layer, forming the pillar interconnect structure, forming a wettable material on sidewalls of the pillar, and removing the barrier layer exterior to the pillar interconnect structure.
Public/Granted literature
- US09177928B1 Contact and solder ball interconnect Public/Granted day:2015-11-03
Information query
IPC分类: