Invention Application
US20150311221A1 INTEGRATED CIRCUITS HAVING NICKEL SILICIDE CONTACTS AND METHODS FOR FABRICATING THE SAME 有权
具有镍硅氧烷接触的集成电路及其制造方法

INTEGRATED CIRCUITS HAVING NICKEL SILICIDE CONTACTS AND METHODS FOR FABRICATING THE SAME
Abstract:
Integrated circuits having nickel silicide contacts and methods for fabricating integrated circuits with nickel silicide contacts are provided. An exemplary method for fabricating an integrated circuit includes providing a semiconductor substrate and forming a nonvolatile memory structure over the semiconductor substrate. The nonvolatile memory structure includes a gate surface. The method further includes depositing a nickel-containing material over the gate surface. Also, the method includes annealing the nonvolatile memory structure and forming a nickel silicide contact on the gate surface from the nickel-containing material.
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