Invention Application
- Patent Title: INTEGRATED CIRCUITS HAVING NICKEL SILICIDE CONTACTS AND METHODS FOR FABRICATING THE SAME
- Patent Title (中): 具有镍硅氧烷接触的集成电路及其制造方法
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Application No.: US14259460Application Date: 2014-04-23
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Publication No.: US20150311221A1Publication Date: 2015-10-29
- Inventor: Jingyan Huang , Chuan Wang , Chim Seng Seet , Yun Ling Tan , Alex See
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/49 ; H01L29/45 ; H01L21/283 ; H01L21/28

Abstract:
Integrated circuits having nickel silicide contacts and methods for fabricating integrated circuits with nickel silicide contacts are provided. An exemplary method for fabricating an integrated circuit includes providing a semiconductor substrate and forming a nonvolatile memory structure over the semiconductor substrate. The nonvolatile memory structure includes a gate surface. The method further includes depositing a nickel-containing material over the gate surface. Also, the method includes annealing the nonvolatile memory structure and forming a nickel silicide contact on the gate surface from the nickel-containing material.
Public/Granted literature
- US09548371B2 Integrated circuits having nickel silicide contacts and methods for fabricating the same Public/Granted day:2017-01-17
Information query
IPC分类: