发明申请
- 专利标题: MULTI-SIZE ADAPTABLE SPIN CHUCK SYSTEM
- 专利标题(中): 多尺寸适配旋钮系统
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申请号: US14716143申请日: 2015-05-19
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公开(公告)号: US20150336127A1公开(公告)日: 2015-11-26
- 发明人: Kirk Emory , Brandon Wilson , Roger Ruesing
- 申请人: Brewer Science Inc.
- 主分类号: B05C5/02
- IPC分类号: B05C5/02
摘要:
A novel interchangeable spin chuck system is provided that allows the user to quickly change substrate sizes and spin chuck styles without any extra tools. This system has a two-piece design and overcomes many of the drawbacks of previous spin chuck designs, such as difficulty in seating the spin chuck and ensuring that the spin chuck is at a consistent flatness and height. Furthermore, this spin chuck system allows the spin chucks to be manufactured at a lower cost. Thus, rather than restricting users to “make do” with incorrect spin chucks due to budget limitations, this economical design gives users access to a wider range of spin chuck sizes and styles.
公开/授权文献
- US10204820B2 Multi-size adaptable spin chuck system 公开/授权日:2019-02-12
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