公开(公告)号：US20150336127A1

公开(公告)日：2015-11-26

申请号：US14716143

申请日：2015-05-19

Applicant: Brewer Science Inc.

Inventor： Kirk Emory ,  Brandon Wilson ,  Roger Ruesing

IPC: B05C5/02

CPC classification number: H01L21/68785 ,  B05C11/08 ,  B05C13/02 ,  B05D1/005 ,  G03F7/162 ,  H01L21/6715 ,  H01L21/68792 ,  Y10T29/50 ,  Y10T279/11

Abstract: A novel interchangeable spin chuck system is provided that allows the user to quickly change substrate sizes and spin chuck styles without any extra tools. This system has a two-piece design and overcomes many of the drawbacks of previous spin chuck designs, such as difficulty in seating the spin chuck and ensuring that the spin chuck is at a consistent flatness and height. Furthermore, this spin chuck system allows the spin chucks to be manufactured at a lower cost. Thus, rather than restricting users to “make do” with incorrect spin chucks due to budget limitations, this economical design gives users access to a wider range of spin chuck sizes and styles.

Abstract translation: 提供了一种新颖的可互换旋转卡盘系统，其允许用户快速地改变基板尺寸和旋转卡盘样式，而无需任何额外的工具。 该系统具有两件式设计，并克服了以前的旋转卡盘设计的许多缺点，例如难以安置旋转卡盘并确保旋转卡盘处于一致的平坦度和高度。 此外，该旋转卡盘系统允许以更低的成本制造旋转卡盘。 因此，由于预算的限制，这种经济的设计使用户不必限制使用错误的旋转卡盘“做”，用户可以访问更广泛的旋转卡盘尺寸和样式。