Invention Application
- Patent Title: LIGHT EMITTING DEVICE AND METHOD OF FABRICATING THE SAME
- Patent Title (中): 发光装置及其制造方法
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Application No.: US14715286Application Date: 2015-05-18
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Publication No.: US20150340562A1Publication Date: 2015-11-26
- Inventor: Min Kyu Kim , Jung Whan Jung , Kyung Hae Kim , Woo Chul Kwak
- Applicant: Seoul Viosys Co., Ltd.
- Priority: KR10-2014-0060231 20140520; KR10-2014-0129305 20140926; KR10-2014-0193540 20141230
- Main IPC: H01L33/32
- IPC: H01L33/32 ; H01L33/00 ; H01L33/38 ; H01L33/06

Abstract:
Embodiments provide a method of growing a p-type nitride semiconductor, and a light emitting device fabricated using the same. The method of growing a p-type nitride semiconductor includes growing a p-type nitride semiconductor layer on a growth substrate by introducing a group III element source, a group V element source, and a p-type dopant into a chamber at a first temperature; and cooling the interior of the chamber from the first temperature to a second temperature, wherein the p-type dopant is introduced into the chamber for at least some part of the cooling of the interior of the chamber from the first temperature to the second temperature. According to the present disclosed technology, it is possible to prevent diffusion of the p-type dopant from a p-type nitride semiconductor layer into the chamber.
Information query
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