发明申请
US20150340617A1 Carbon Nanotube-Graphene Hybrid Transparent Conductor and Field Effect Transistor
有权
碳纳米管 - 石墨烯混合透明导体和场效应晶体管
- 专利标题： Carbon Nanotube-Graphene Hybrid Transparent Conductor and Field Effect Transistor
- 专利标题（中）： 碳纳米管 - 石墨烯混合透明导体和场效应晶体管
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申请号： US14820011申请日： 2015-08-06
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公开(公告)号： US20150340617A1公开(公告)日： 2015-11-26
- 发明人: Ageeth A. Bol , Bhupesh Chandra , Amal Kasry , Ahmed Maarouf , Glenn J. Martyna , George S. Tulevski
- 申请人： International Business Machines Corporation , Egypt Nanotechnology Center
- 主分类号： H01L51/00
- IPC分类号： H01L51/00 ; H01L51/05
摘要：
A nanotube-graphene hybrid nano-component and method for forming a cleaned nanotube-graphene hybrid nano-component. The nanotube-graphene hybrid nano-component includes a gate; a gate dielectric formed on the gate; a channel comprising a carbon nanotube-graphene hybrid nano-component formed on the gate dielectric; a source formed over a first region of the carbon nanotube-graphene hybrid nano-component; and a drain formed over a second region of the carbon nanotube-graphene hybrid nano-component to form a field effect transistor.