Invention Application
US20150344295A1 SYSTEM FOR DRIVING AN ARRAY OF MEMS STRUCTURES AND CORRESPONDING DRIVING METHOD
有权
用于驱动MEMS结构阵列和相应驱动方法的系统
- Patent Title: SYSTEM FOR DRIVING AN ARRAY OF MEMS STRUCTURES AND CORRESPONDING DRIVING METHOD
- Patent Title (中): 用于驱动MEMS结构阵列和相应驱动方法的系统
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Application No.: US14675230Application Date: 2015-03-31
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Publication No.: US20150344295A1Publication Date: 2015-12-03
- Inventor: Alberto CATTANI , Alessandro GASPARINI , Federico GUANZIROLI , Pierangelo CONFALONIERI
- Applicant: STMICROELECTRONICS S.R.L.
- Priority: ITTO2014A000422 20140527
- Main IPC: B81B7/00
- IPC: B81B7/00

Abstract:
A system for driving a MEMS array having a number of MEMS structures, each defining at least one row terminal and one column terminal, envisages: a number of row driving stages, each for supplying row-biasing signals to the row terminal of each MEMS structure associated to a respective row; a number of column driving stages, each for supplying column-biasing signals to the column terminal of each MEMS structure associated to a respective column; and a control unit, for supplying row-address signals to the row driving stages for generation of the row-biasing signals and for supplying column-address signals to the column driving stages for generation of the column-biasing signals. The control unit further supplies row-deactivation and/or column-deactivation signals to one or more of the row and column driving stages, for causing deactivation of one or more rows and/or columns of the MEMS array.
Public/Granted literature
- US09604842B2 System for driving an array of MEMS structures and corresponding driving method Public/Granted day:2017-03-28
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