SYSTEM FOR DRIVING AN ARRAY OF MEMS STRUCTURES AND CORRESPONDING DRIVING METHOD
    1.
    发明申请
    SYSTEM FOR DRIVING AN ARRAY OF MEMS STRUCTURES AND CORRESPONDING DRIVING METHOD 有权
    用于驱动MEMS结构阵列和相应驱动方法的系统

    公开(公告)号:US20150344295A1

    公开(公告)日:2015-12-03

    申请号:US14675230

    申请日:2015-03-31

    Abstract: A system for driving a MEMS array having a number of MEMS structures, each defining at least one row terminal and one column terminal, envisages: a number of row driving stages, each for supplying row-biasing signals to the row terminal of each MEMS structure associated to a respective row; a number of column driving stages, each for supplying column-biasing signals to the column terminal of each MEMS structure associated to a respective column; and a control unit, for supplying row-address signals to the row driving stages for generation of the row-biasing signals and for supplying column-address signals to the column driving stages for generation of the column-biasing signals. The control unit further supplies row-deactivation and/or column-deactivation signals to one or more of the row and column driving stages, for causing deactivation of one or more rows and/or columns of the MEMS array.

    Abstract translation: 用于驱动具有多个MEMS结构的MEMS阵列的系统,每个MEMS结构限定至少一个行端子和一个列端子,设想:多个行驱动级,每个用于向每个MEMS结构的行端子提供行偏置信号 相关联的行; 多个列驱动级,每个列驱动级用于向与各列相关联的每个MEMS结构的列端子提供列偏置信号; 以及控制单元,用于将行地址信号提供到行驱动级,用于产生行偏置信号,并将列地址信号提供给列驱动级,以产生列偏置信号。 控制单元还向行驱动级和列驱动级中的一个或多个驱动级提供行去激活和/或列停用信号,以使MEMS阵列的一个或多个行和/或列的去激活。

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