Invention Application
- Patent Title: METHOD FOR MANUFACTURING NANO-STRUCTURED SEMICONDUCTOR LIGHT-EMITTING ELEMENT
- Patent Title (中): 制造纳米结构半导体发光元件的方法
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Application No.: US14764484Application Date: 2014-01-28
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Publication No.: US20150364642A1Publication Date: 2015-12-17
- Inventor: Nam-Goo CHA , Dong-Ho KIM , Geon-Wook YOO
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2013-0010112 20130129; KR10-2013-0147783 20131129
- International Application: PCT/KR2014/000810 WO 20140128
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/44 ; H01L33/24 ; H01L33/36 ; H01L33/08 ; H01L33/06

Abstract:
There is provided a method for manufacturing a nanostructure semiconductor light emitting device, including: forming a mask having a plurality of openings on a base layer; growing a first conductivity-type semiconductor layer on exposed regions of the base layer such that the plurality of openings are filled, to form a plurality of nanocores; partially removing the mask such that side surfaces of the plurality of nanocores are exposed; heat-treating the plurality of nanocores after partially removing the mask; sequentially growing an active layer and a second conductivity-type semiconductor layer on surfaces of the plurality of nanocores to form a plurality of light emitting nanostructures, after the heat treatment; and planarizing upper parts of the plurality of light emitting nanostructures such that upper surfaces of the nanocores are exposed.
Public/Granted literature
- US09508893B2 Method for manufacturing nano-structured semiconductor light-emitting element Public/Granted day:2016-11-29
Information query
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