Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
- Patent Title (中): 半导体器件
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Application No.: US14788940Application Date: 2015-07-01
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Publication No.: US20160013321A1Publication Date: 2016-01-14
- Inventor: Yoshiyuki KOBAYASHI , Shinpei MATSUDA , Shunpei YAMAZAKI
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: JP2014-143110 20140711
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
A semiconductor device having stable electric characteristics is provided. The transistor includes first to third oxide semiconductor layers, a gate electrode, and a gate insulating layer. The second oxide semiconductor layer has a portion positioned between the first and third oxide semiconductor layers. The gate insulating layer has a region in contact with a top surface of the third oxide semiconductor layer. The gate electrode overlaps with a top surface of the portion with the gate insulating layer positioned therebetween. The gate electrode faces a side surface of the portion in a channel width direction with the gate insulating layer positioned therebetween. The second oxide semiconductor layer includes a region having a thickness greater than or equal to 2 nm and less than 8 nm. The length in the channel width direction of the second oxide semiconductor layer is less than 60 nm.
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