Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
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Application No.: US14876640Application Date: 2015-10-06
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Publication No.: US20160027690A1Publication Date: 2016-01-28
- Inventor: Yuichi NAKAO , Satoshi KAGEYAMA , Masaru NAITOU
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Priority: JP2006-302982 20061108; JP2006-306998 20061113
- Main IPC: H01L21/768
- IPC: H01L21/768

Abstract:
The semiconductor device according to the present invention includes a semiconductor substrate, a first insulating layer laminated on the semiconductor substrate, a first metal wiring pattern embedded in a wire-forming region of the first insulating layer, a second insulating layer laminated on the first insulating layer, a second metal wiring pattern embedded in a wire-forming region of the second insulating layer and first dummy metal patterns embedded each in a wire-opposed region opposing to the wire-forming region of the second insulating layer and in a non-wire-opposed region opposing to a non-wire-forming region other than the wire-forming region of the second insulating layer, the wire-opposed region and the non-wire-opposed region each in a non-wire-forming region other than the wire-forming region of the first insulating layer.
Public/Granted literature
- US09337090B2 Semiconductor device Public/Granted day:2016-05-10
Information query
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