Invention Application
- Patent Title: Methods Of Low-Temperature Fabrication Of Crystalline Semiconductor Alloy On Amorphous Substrate
- Patent Title (中): 晶体半导体合金在非晶基板上的低温制造方法
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Application No.: US14878849Application Date: 2015-10-08
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Publication No.: US20160027950A1Publication Date: 2016-01-28
- Inventor: Jifeng Liu , Haofeng Li , Xiaoxin Wang
- Applicant: The Trustees of Dartmouth College
- Main IPC: H01L31/0687
- IPC: H01L31/0687 ; H01L31/0232 ; H01L27/144 ; H01L31/103 ; H01L31/109 ; H01L31/18 ; H01L31/0725

Abstract:
Methods are discussed for producing single-crystal shapes on amorphous materials. A first method deposits a layer of Germanium-Tin (GeSn) alloy comprising between three and sixteen atomic-percent tin on material incapable of seeding crystal formation, the layer is photolithographically defined into a shape having a point having radius less than 100 nanometers; and the shape is annealed by heating to a temperature below 450 degrees Celsius. A second method also photolithographically defines a shape on a layer of GeSn, then uses a laser to heat and crystalize seed spot on the shape; and anneals the shape by heating and thereby crystalizing additional GeSn alloy of the shape. In embodiments, the crystalized GeSn serves to seed InGaP and/or InGaAs layers that may serve together with the GeSn as layers of a tandem photovoltaic cell.
Information query
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