Invention Application
- Patent Title: OPTICAL TEMPERATURE SENSOR AND METHOD OF CONTROLLING SAME
- Patent Title (中): 光学温度传感器及其控制方法
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Application No.: US14804557Application Date: 2015-07-21
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Publication No.: US20160033335A1Publication Date: 2016-02-04
- Inventor: Kenichiro YAMADA , Takari YAMAMOTO
- Applicant: Tokyo Electron Limited
- Priority: JP2014-153893 20140729
- Main IPC: G01J5/02
- IPC: G01J5/02 ; G01J5/08 ; G01J5/10

Abstract:
An optical temperature sensor includes an light-emitting-side measurement unit to measure a first light intensity of a measuring beam and a second light intensity of a reference beam, and a light-receiving-side measurement unit to measure a third light intensity of a first reflected beam of the measuring beam and a fourth light intensity of a second reflected beam of the reference beam. The optical temperature sensor further includes a control unit to adjust at least one of a first control target value of the first light intensity and a second control target value of the second light intensity based on at least one of the third light intensity and the fourth light intensity. The control unit controls at least one of the first light intensity and the second light intensity based on the adjusted at least one of the first and second control target values.
Public/Granted literature
- US09885612B2 Optical temperature sensor and method of controlling same Public/Granted day:2018-02-06
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