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    SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD
    1.
    发明申请
    SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD 有权

    公开(公告)号：US20220013387A1

    公开(公告)日：2022-01-13

    申请号：US17484914

    申请日：2021-09-24

    Applicant: TOKYO ELECTRON LIMITED

    Inventor： Kenichiro YAMADA ,  Satoru TERUUCHI ,  Kenichiro NAKAMURA ,  Takari YAMAMOTO

    IPC: H01L21/67 ,  C23C16/46 ,  C23C16/509 ,  H01J37/32 ,  C23C16/50 ,  C23C16/52 ,  H01L21/683 ,  H05B1/02

    Abstract: A substrate processing system includes a substrate processing apparatus and a control device. The substrate processing apparatus includes a chamber, and a placing table provided inside the chamber. The placing table places a substrate thereon, and includes a base and an electrostatic chuck provided on an upper surface of the base. The electrostatic chuck has a plurality of division regions each provided with a heater therein. The substrate processing system also includes a control device that includes a measuring unit that measures a resistance value of the heater for each of the division regions, an estimating unit that estimates a temperature of each of the division regions based on the resistance value of the heater measured by the measuring unit, and a power controller that controls a power supplied to the heater for each of the division regions based on the temperature estimated by the estimating unit.

    OPTICAL TEMPERATURE SENSOR AND METHOD OF CONTROLLING SAME
    3.
    发明申请
    OPTICAL TEMPERATURE SENSOR AND METHOD OF CONTROLLING SAME 有权
    光学温度传感器及其控制方法

    公开(公告)号：US20160033335A1

    公开(公告)日：2016-02-04

    申请号：US14804557

    申请日：2015-07-21

    Applicant: Tokyo Electron Limited

    Inventor： Kenichiro YAMADA ,  Takari YAMAMOTO

    IPC: G01J5/02 ,  G01J5/08 ,  G01J5/10

    CPC classification number: G01J5/0896 ,  G01J5/58

    Abstract: An optical temperature sensor includes an light-emitting-side measurement unit to measure a first light intensity of a measuring beam and a second light intensity of a reference beam, and a light-receiving-side measurement unit to measure a third light intensity of a first reflected beam of the measuring beam and a fourth light intensity of a second reflected beam of the reference beam. The optical temperature sensor further includes a control unit to adjust at least one of a first control target value of the first light intensity and a second control target value of the second light intensity based on at least one of the third light intensity and the fourth light intensity. The control unit controls at least one of the first light intensity and the second light intensity based on the adjusted at least one of the first and second control target values.

    Abstract translation: 光学温度传感器包括：测量测量光束的第一光强度和参考光束的第二光强度的发光侧测量单元;以及光接收侧测量单元，测量第三光强度 测量光束的第一反射光束和参考光束的第二反射光束的第四光强度。 光学温度传感器还包括控制单元，用于基于第三光强度和第四光中的至少一个来调节第一光强度的第一控制目标值和第二光强度的第二控制目标值中的至少一个 强度。 控制单元基于所调整的第一和第二控制目标值中的至少一个来控​​制第一光强度和第二光强度中的至少一个。

    TEMPERATURE MEASUREMENT DEVICE, LIGHT EMITTING MODULE AND TEMPERATURE MEASUREMENT METHOD
    4.
    发明申请
    TEMPERATURE MEASUREMENT DEVICE, LIGHT EMITTING MODULE AND TEMPERATURE MEASUREMENT METHOD 审中-公开

    公开(公告)号：US20170176264A1

    公开(公告)日：2017-06-22

    申请号：US15115989

    申请日：2015-02-25

    Applicant: Tokyo Electron Limited

    Inventor： Takari YAMAMOTO ,  Kenichiro YAMADA ,  Shinya YAMANAKA

    IPC: G01K11/12 ,  G01K15/00

    CPC classification number: G01K11/12 ,  G01K11/32 ,  G01K15/005

    Abstract: A temperature measurement device includes a light emitting part including a first light source configured to output measurement light with a first wavelength and a second light source configured to output reference light with a second wavelength, a light receiving part configured to receive reflected light of the measurement light and reflected light of the reference light that have passed through a temperature sensing device that changes light transmission characteristics with changes in temperature, a control part configured to measure a temperature detected by the temperature sensing device based on an amount of light of the received reflected light of the measurement light and an amount of light of the received reflected light of the reference light, and a temperature adjustment part configured to separately adjust the temperature of the first light source and the temperature of the second light source.

    OPTICAL TEMPERATURE SENSOR AND METHOD FOR MANUFACTURING OPTICAL TEMPERATURE SENSOR
    5.
    发明申请
    OPTICAL TEMPERATURE SENSOR AND METHOD FOR MANUFACTURING OPTICAL TEMPERATURE SENSOR 审中-公开
    光学温度传感器和制造光学温度传感器的方法

    公开(公告)号：US20160363486A1

    公开(公告)日：2016-12-15

    申请号：US15116569

    申请日：2015-03-02

    Applicant: Tokyo Electron Limited

    Inventor： Takari YAMAMOTO ,  Kenichiro YAMADA ,  Yoshiki YAMAKAWA ,  Yuji MIZUMA ,  Hirokazu TANIGUCHI ,  Masatoshi TABIRA

    IPC: G01K11/12 ,  G01K1/08

    CPC classification number: G01K11/125 ,  G01K1/08 ,  G01K1/14

    Abstract: Provided is an optical temperature sensor including a temperature sensing element having light transmission characteristics that vary with temperature, a hollow holding member that holds the temperature sensing element, and an optical fiber that is arranged inside the holding member, the optical fiber including a tip face that is disposed to face the temperature sensing element at a position separated from the temperature sensing element by a predetermined distance. The temperature sensing element allows light emitted from the tip face of the optical fiber to be incident thereon, allows the incident light to be transmitted therethrough, and allows reflected light of the transmitted light that has been reflected by a measuring object to be transmitted therethrough.

    Abstract translation: 提供了一种光学温度传感器，其包括具有随温度变化的透光特性的温度感测元件，保持温度感测元件的中空保持部件和布置在保持部件内部的光纤，该光纤包括尖端面 其设置成在与温度感测元件分离预定距离的位置处面对温度感测元件。 温度检测元件允许从光纤的前端面发射的光入射到其上，允许入射光透射通过，允许被测量对象反射的透射光的反射光透过。

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