Invention Application
US20160035547A1 MAGNETRON ASSEMBLY FOR PHYSICAL VAPOR DEPOSITION CHAMBER 有权
用于物理蒸气沉积室的MAGNETRON装配

MAGNETRON ASSEMBLY FOR PHYSICAL VAPOR DEPOSITION CHAMBER
Abstract:
Methods and apparatus for a magnetron assembly are provided herein. In some embodiments, a magnetron assembly includes a shunt plate having a central axis and rotatable about the central axis, a closed loop magnetic pole coupled to a first surface of the shunt plate and disposed 360 degrees along a peripheral edge of the shunt plate, and an open loop magnetic pole coupled at a the first surface of the shunt plate wherein the open loop magnetic pole comprises two rows of magnets disposed about the central axis.
Public/Granted literature
Information query
Patent Agency Ranking
0/0