Invention Application
- Patent Title: LIQUID PROCESSING METHOD AND STORAGE MEDIUM
- Patent Title (中): 液体加工方法和储存介质
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Application No.: US14919869Application Date: 2015-10-22
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Publication No.: US20160054653A1Publication Date: 2016-02-25
- Inventor: Norihiko Sasagawa , Hiroichi Inada , Yasushi Takiguchi
- Applicant: Tokyo Electron Limited
- Priority: JP2010-195840 20100901
- Main IPC: G03F7/16
- IPC: G03F7/16

Abstract:
A liquid processing method includes: accommodating a substrate horizontally in each of a first processing region and a second processing region, for performing therein a process on the substrate by a processing solution from a nozzle; rotating a rotary body about a vertical axis; keeping a plurality of processing nozzles provided at the rotary body; supplying different kinds of processing solutions to the substrate from the plurality of processing nozzles; holding a processing nozzle selected from the plurality of processing nozzles by a nozzle holder provided at the rotary body; transferring the nozzle holder into selected one of the first and the second processing regions by a nozzle transfer device; and rotating the rotary body by a rotation driving unit so as to allow a front of the nozzle holder in a forward/backward direction thereof to face the selected one of the first and the second processing regions.
Public/Granted literature
- US10168618B2 Liquid processing method and storage medium Public/Granted day:2019-01-01
Information query
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