Invention Application
- Patent Title: METHOD AND OPTOELECTRONIC STRUCTURE PROVIDING POLYSILICON PHOTONIC DEVICES WITH DIFFERENT OPTICAL PROPERTIES IN DIFFERENT REGIONS
- Patent Title (中): 在不同地区提供具有不同光学特性的多晶硅光电器件的方法和光电结构
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Application No.: US14467449Application Date: 2014-08-25
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Publication No.: US20160056309A1Publication Date: 2016-02-25
- Inventor: Roy Meade , Karan Mehta , Efraim Megged , Jason Orcutt , Milos Popovic , Rajeev Ram , Jeffrey Shainline , Zvi Sternberg , Vladimir Stojanovic , Ofer Tehar-Zahav
- Applicant: MICRON TECHNOLOGY, INC. , Massachusetts Institute of Technology
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L27/144 ; H01L31/18 ; H01L31/0368
Abstract:
Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.
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