Invention Application
- Patent Title: TEST KEY ARRAY
- Patent Title (中): 测试键阵列
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Application No.: US14472348Application Date: 2014-08-28
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Publication No.: US20160064295A1Publication Date: 2016-03-03
- Inventor: Tse-Min Chao , Tzu-Yun Chang , Hsueh-Chun Hsiao
- Applicant: UNITED MICROELECTRONICS CORP.
- Main IPC: H01L21/66
- IPC: H01L21/66

Abstract:
The present invention provides a test key array including a lower conductive pattern, and the lower conductive pattern includes a plurality of first L-shaped traces parallel to each other, an upper conductive pattern, where the upper conductive pattern includes a plurality of second L-shaped traces parallel to each other, the lower conductive pattern crosses to the upper conductive pattern, and a plurality of cross regions are defined between the lower conductive pattern and the upper conductive pattern, and a plurality of conductive plugs, disposed on parts of the cross regions, electrically connecting to the lower conductive pattern and the upper conductive pattern.
Public/Granted literature
- US09691671B2 Test key array Public/Granted day:2017-06-27
Information query
IPC分类: