公开(公告)号：US09691671B2

公开(公告)日：2017-06-27

申请号：US14472348

申请日：2014-08-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Tse-Min Chao ,  Tzu-Yun Chang ,  Hsueh-Chun Hsiao

IPC: H01L21/66

CPC classification number: H01L22/34

Abstract: The present invention provides a test key array including a lower conductive pattern, and the lower conductive pattern includes a plurality of first L-shaped traces parallel to each other, an upper conductive pattern, where the upper conductive pattern includes a plurality of second L-shaped traces parallel to each other, the lower conductive pattern crosses to the upper conductive pattern, and a plurality of cross regions are defined between the lower conductive pattern and the upper conductive pattern, and a plurality of conductive plugs, disposed on parts of the cross regions, electrically connecting to the lower conductive pattern and the upper conductive pattern.

公开(公告)号：US20160064295A1

公开(公告)日：2016-03-03

申请号：US14472348

申请日：2014-08-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Tse-Min Chao ,  Tzu-Yun Chang ,  Hsueh-Chun Hsiao

IPC: H01L21/66

CPC classification number: H01L22/34

Abstract: The present invention provides a test key array including a lower conductive pattern, and the lower conductive pattern includes a plurality of first L-shaped traces parallel to each other, an upper conductive pattern, where the upper conductive pattern includes a plurality of second L-shaped traces parallel to each other, the lower conductive pattern crosses to the upper conductive pattern, and a plurality of cross regions are defined between the lower conductive pattern and the upper conductive pattern, and a plurality of conductive plugs, disposed on parts of the cross regions, electrically connecting to the lower conductive pattern and the upper conductive pattern.

Abstract translation: 本发明提供了包括下导电图案的测试键阵列，并且下导电图案包括彼此平行的多个第一L形迹线，上导电图案，其中上导电图案包括多个第二L形迹线， 形状的迹线彼此平行，下导电图案与上导电图案交叉，并且在下导电图案和上导电图案之间限定多个交叉区域，以及多个导电插头，设置在十字的部分上 区域，电连接到下导电图案和上导电图案。