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发明申请
US20160072474A1 RESONATION ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE AND MOVING OBJECT 有权
谐振元件，谐振器，振荡器，电子设备和移动对象

  • 专利标题： RESONATION ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE AND MOVING OBJECT
  • 专利标题（中）： 谐振元件，谐振器，振荡器，电子设备和移动对象
  • 申请号： US14836354
    申请日： 2015-08-26
  • 公开(公告)号： US20160072474A1
    公开(公告)日： 2016-03-10
  • 发明人: Akinori YAMADA
  • 申请人： SEIKO EPSON CORPORATION
  • 优先权： JP2014-183733 20140909
  • 主分类号： H03H9/24
  • IPC分类号： H03H9/24 ;  H03B5/30
RESONATION ELEMENT, RESONATOR, OSCILLATOR, ELECTRONIC DEVICE AND MOVING OBJECT
摘要：
A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [μm], and lengths of the resonating arms are set to L [μm], at least one expression of the following Expression (1) and the following Expression (2) is satisfied. W
摘要（中）：

谐振元件包括基部，从基部向Y轴方向延伸的谐振臂，以及Z轴方向设定为厚度方向的单晶硅形成的振动基板，为 被配置为使得谐振臂在XY面内方向上弯曲地振动。 此外，当谐振臂的谐振频率设定为F [kHz]时，谐振臂的宽度被设定为W [μm]，并且谐振臂的长度被设定为L [μm]，至少一个表达式 满足以下表达式（1）和以下表达式（2）。 W <10A×Log（F）+ B（1）其中，A为-5.006×10-1，B为2.451，L <10C×Log（F）+ D（2）其中，C为-7.507× 10-1，D为4.268。

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