Invention Application
- Patent Title: Integrated Multi-Pass Inspection
- Patent Title (中): 综合多通检查
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Application No.: US14890880Application Date: 2014-05-14
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Publication No.: US20160093040A1Publication Date: 2016-03-31
- Inventor: Weston L. Sousa , Yalin Xiong , Rui-Fang Shi
- Applicant: KLA-TENCOR CORPORATION
- International Application: PCT/US2014/038017 WO 20140514
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01N21/88 ; G03F1/84

Abstract:
Methods and systems for integrated multi-pass reticle inspection are provided. One method for inspecting a reticle includes acquiring at least first, second, and third images for the reticle. The first image is a substantially high resolution image of light transmitted by the reticle. The second image is a substantially high resolution image of light reflected from the reticle. The third image is an image of light transmitted by the reticle that is acquired with a substantially low numerical aperture. The method also includes detecting defects on the reticle using at least the first, second, and third images for the reticle in combination.
Public/Granted literature
- US09778207B2 Integrated multi-pass inspection Public/Granted day:2017-10-03
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