Invention Application
- Patent Title: BOND PAD WITH MICRO-PROTRUSIONS FOR DIRECT METALLIC BONDING
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Application No.: US14496082Application Date: 2014-09-25
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Publication No.: US20160093583A1Publication Date: 2016-03-31
- Inventor: Aibin Yu , Wei Zhou , Zhaohui Ma
- Applicant: MICRON TECHNOLOGY, INC.
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/48

Abstract:
A bond pad with micro-protrusions for direct metallic bonding. In one embodiment, a semiconductor device comprises a semiconductor substrate, a through-silicon via (TSV) extending through the semiconductor substrate, and a copper pad electrically connected to the TSV and having a coupling side. The semiconductor device further includes a copper element that projects away from the coupling side of the copper pad. In another embodiment, a bonded semiconductor assembly comprises a first semiconductor substrate with a first TSV and a first copper pad electrically coupled to the first TSV, wherein the first copper pad has a first coupling side. The bonded semiconductor assembly further comprises a second semiconductor substrate, opposite to the first semiconductor substrate, the second semiconductor substrate comprising a second copper pad having a second coupling side. A plurality of copper connecting elements extend between the first and second coupling sides of the first and second copper pads.
Information query
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