Invention Application
- Patent Title: IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR
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Application No.: US14964781Application Date: 2015-12-10
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Publication No.: US20160094760A1Publication Date: 2016-03-31
- Inventor: Yigal KATZIR , Itay GUR-ARIE , Yacov MALINOVICH
- Applicant: Orbotech Ltd.
- Applicant Address: IL Yavne
- Assignee: Orbotech Ltd.
- Current Assignee: Orbotech Ltd.
- Current Assignee Address: IL Yavne
- Main IPC: H04N3/14
- IPC: H04N3/14 ; H04N5/3745 ; H04N5/374
Abstract:
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
Information query
