Invention Application
US20160097792A1 THREE-AXIS MICROELECTROMECHANICAL SYSTEMS DEVICE WITH SINGLE PROOF MASS 有权
具有单质量质量的三轴微电子系统设备

  • Patent Title: THREE-AXIS MICROELECTROMECHANICAL SYSTEMS DEVICE WITH SINGLE PROOF MASS
  • Patent Title (中): 具有单质量质量的三轴微电子系统设备
  • Application No.: US14506022
    Application Date: 2014-10-03
  • Publication No.: US20160097792A1
    Publication Date: 2016-04-07
  • Inventor: MICHAEL NAUMANN
  • Applicant: FREESCALE SEMICONDUCTOR, INC.
  • Main IPC: G01P15/125
  • IPC: G01P15/125 B81B3/00
THREE-AXIS MICROELECTROMECHANICAL SYSTEMS DEVICE WITH SINGLE PROOF MASS
Abstract:
A microelectromechanical systems (MEMS) device, such as a three-axis MEMS device can sense acceleration in three orthogonal axes. The MEMS device includes a single proof mass and suspension spring systems that movably couple the proof mass to a substrate. The suspension spring systems include translatory spring elements and torsion spring elements. The translatory spring elements enable translatory motion of the proof mass relative to the substrate in two orthogonal directions that are parallel to the plane of the MEMS device in order to sense forces in the two orthogonal directions. The torsion spring elements enable rotation of the proof mass about a rotational axis in order to sense force in a third direction that is orthogonal to the other two directions. The translatory spring elements have asymmetric stiffness configured to compensate for an asymmetric mass of the movable element used to sense in the third direction.
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