公开(公告)号：US20170370799A1

公开(公告)日：2017-12-28

申请号：US15189892

申请日：2016-06-22

申请人： FREESCALE SEMICONDUCTOR INC.

发明人： PETER T. JONES ,  ARVIND SALIAN ,  WILLIAM D. MCWHORTER ,  CHAD KRUEGER ,  JOHN SHIPMAN ,  MICHAEL NAUMANN ,  LARRY D. METZLER ,  TRIPTI REGMI

IPC分类号： G01M7/08 ,  B81C99/00

CPC分类号： G01M7/08 ,  B81B2201/0235 ,  B81C99/0045 ,  B81C99/005

摘要： Methods and apparatuses are provided for evaluating or testing stiction in Microelectromechanical Systems (MEMS) devices utilizing a mechanized shock pulse generation approach. In one embodiment, the method includes the step or process of loading a MEMS device, such as a multi-axis MEMS accelerometer, into a socket provided on a Device-Under-Test (DUT) board. After loading the MEMS device into the socket, a series of controlled shock pulses is generated and transmitted through the MEMS device utilizing a mechanized test apparatus. The mechanized test apparatus may, for example, repeatedly move the DUT board over a predefined motion path to generate the controlled shock pulses. In certain cases, transverse vibrations may also be directed through the tested MEMS device in conjunction with the shock pulses. An output of the MEMS device is then monitored to determine whether stiction of the MEMS device occurs during each of the series of controlled shock pulses.

公开(公告)号：US20170089945A1

公开(公告)日：2017-03-30

申请号：US14869355

申请日：2015-09-29

申请人： FREESCALE SEMICONDUCTOR, INC.

发明人： MICHAEL NAUMANN

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  G01P2015/0831 ,  G01P2015/0834 ,  G01P2015/0857 ,  G01P2015/0874

摘要： A MEMS sensor includes a movable element positioned in spaced apart relationship above a surface of a substrate and a single centrally located suspension anchor formed on the surface of the substrate. First and second rigid beams are coupled to opposing sides of the suspension anchor and are suspended above the surface of the substrate. A first torsion spring is interconnected between the movable element and the first rigid beam, and a second torsion spring is interconnected between the movable element and the first rigid beam. The rigid beams and the torsion springs are stiff in a lateral direction relative to the surface of the substrate so as to limit slide displacement of the movable element under the condition of a multi-directional overload situation.

公开(公告)号：US20160131552A1

公开(公告)日：2016-05-12

申请号：US14535960

申请日：2014-11-07

申请人： FREESCALE SEMICONDUCTOR, INC.

发明人： MICHAEL NAUMANN

IPC分类号： G01M7/08 ,  G01P15/02

CPC分类号： G01M7/08 ,  G01P15/03 ,  G01P15/036 ,  G01P15/06 ,  G01P15/0891

摘要： A micromechanical shock sensor includes a proof mass coupled to a surface of a substrate and a projection element extending laterally from the proof mass. The shock sensor further includes a latch mechanism and a retention anchor. The latch mechanism has a latch spring attached to the surface and a latch tip extending from a movable end of the latch spring. The retention anchor is attached to the surface and is located proximate the latch tip. The proof mass is configured for planar movement relative to the substrate when the proof mass is subjected to a force of at least a threshold magnitude. Movement of the proof mass in response to the force causes the latch tip to become retained between the projection element and the retention anchor to place the shock sensor in a latched state. The latched state may be detected by optical inspection, probe, or external readout.

摘要翻译： 微机械式震动传感器包括耦合到基板的表面的检测质量和从检验质量块横向延伸的突出元件。 冲击传感器还包括闩锁机构和保持锚。 闩锁机构具有附接到表面的闩锁弹簧和从闩锁弹簧的可动端延伸的闩锁尖端。 保持锚附接到表面并且位于闩锁尖端附近。 当证明质量体经受至少阈值大小的力时，检验质量块构造成相对于衬底的平面运动。 响应于力的运动证明质量使得闩锁尖端保持在突出元件和保持锚固件之间，以将冲击传感器置于锁定状态。 锁定状态可以通过光学检查，探头或外部读出来检测。

公开(公告)号：US20170023606A1

公开(公告)日：2017-01-26

申请号：US14807665

申请日：2015-07-23

申请人： FREESCALE SEMICONDUCTOR, INC.

发明人： MICHAEL NAUMANN

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  B81B7/0016 ,  B81B2201/0235

摘要： A microelectromechanical systems (MEMS) device is provided, which includes a substrate; a proof mass positioned in space above a surface of the substrate, where the proof mass is configured to move relative to the substrate; a flexible travel stop structure formed within the proof mass, where the flexible travel stop structure includes a contact lever connected to the proof mass via flexible elements; and a bumper formed on the surface of the substrate, where the contact lever is aligned to make contact with the bumper when the proof mass moves toward the substrate.

摘要翻译： 提供了一种微机电系统（MEMS）装置，其包括基板; 定位在基板表面上方的空间中的证明物质，其中证明物质被构造成相对于基底移动; 形成在所述检验质量块内的柔性行走止动结构，其中所述柔性行走止动结构包括通过柔性元件连接到所述检验质量块的接触杆; 以及形成在所述基板的表面上的保险杠，其中所述接触杆对准以在所述证明块朝向所述基板移动时与所述保险杠接触。

公开(公告)号：US20160370180A1

公开(公告)日：2016-12-22

申请号：US14742452

申请日：2015-06-17

申请人： FREESCALE SEMICONDUCTOR, INC.

发明人： MICHAEL NAUMANN

IPC分类号： G01C19/5621 ,  G01C19/5614

CPC分类号： G01C19/5621 ,  G01C19/5614 ,  G01C19/5733

摘要： A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.

摘要翻译： MEMS器件包括耦合一对可移动质量块的两个弹簧系统。 每个弹簧系统包括受约束的刚性梁和一对挠曲，其中一个挠曲件直接联接到刚性梁的一端和一个可移动质量块，另一个挠曲件直接联接到刚性梁的相对端 梁和另一个可移动的质量。 响应于可移动质量块的驱动运动，挠曲件能够使约束的刚性梁枢轴运动，使得刚性梁绕其中心铰链点以相反方向枢转。 该枢转运动使驱动质量块的反相线性振荡运动能够基本上抑制或以其他方式拒绝可移动质量块的同相运动。

公开(公告)号：US20160097792A1

公开(公告)日：2016-04-07

申请号：US14506022

申请日：2014-10-03

申请人： FREESCALE SEMICONDUCTOR, INC.

发明人： MICHAEL NAUMANN

IPC分类号： G01P15/125 ,  B81B3/00

CPC分类号： G01P15/125 ,  B81B3/0021 ,  B81B3/007 ,  B81B2201/0235 ,  G01P15/18 ,  G01P2015/0845

摘要： A microelectromechanical systems (MEMS) device, such as a three-axis MEMS device can sense acceleration in three orthogonal axes. The MEMS device includes a single proof mass and suspension spring systems that movably couple the proof mass to a substrate. The suspension spring systems include translatory spring elements and torsion spring elements. The translatory spring elements enable translatory motion of the proof mass relative to the substrate in two orthogonal directions that are parallel to the plane of the MEMS device in order to sense forces in the two orthogonal directions. The torsion spring elements enable rotation of the proof mass about a rotational axis in order to sense force in a third direction that is orthogonal to the other two directions. The translatory spring elements have asymmetric stiffness configured to compensate for an asymmetric mass of the movable element used to sense in the third direction.

摘要翻译： 诸如三轴MEMS器件的微机电系统（MEMS）装置可以感测三个正交轴中的加速度。 MEMS器件包括将校准质量块可移动地耦合到衬底的单个校准质量块和悬架弹簧系统。 悬架弹簧系统包括平移弹簧元件和扭转弹簧元件。 平移弹簧元件使平行于MEMS器件的平面的两个正交方向上的校准质量体能够相对于衬底的平移运动，以便在两个正交方向上感测力。 扭转弹簧元件使得证明块绕旋转轴线旋转，以便在与其它两个方向正交的第三方向上感测力。 平移弹簧元件具有非对称刚度，其被配置为补偿用于在第三方向上感测的可移动元件的不对称质量。