Invention Application
- Patent Title: LATERALLY DIFFUSED METAL OXIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
- Patent Title (中): 侧向扩散金属氧化物半导体器件及其制造方法
-
Application No.: US14891470Application Date: 2014-05-16
-
Publication No.: US20160099347A1Publication Date: 2016-04-07
- Inventor: Shu Zhang , Guangtao Han , Guipeng Sun
- Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Priority: CN201310186628.0 20130516
- International Application: PCT/CN2014/077681 WO 20140516
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/02 ; H01L21/28 ; H01L21/426 ; H01L21/027

Abstract:
Provided is a manufacturing method for a laterally diffused metal oxide semiconductor device, comprising the following steps: growing an oxide layer on a substrate of a wafer (S210); coating a photoresist on the surface of the wafer (S220); performing photoetching by using a first photoetching mask, and exposing a first implantation window after development (S230); performing ion implantation via the first implantation window to form a drift region in the substrate (S240); coating one layer of photoresist on the surface of the wafer again after removing the photoresist (S250); performing photoetching by using the photoetching mask of the oxide layer of the drift region (S260); and etching the oxide layer to form the oxide layer of the drift region (S270). Further provided is a laterally diffused metal oxide semiconductor device.
Public/Granted literature
- US09768292B2 Laterally diffused metal oxide semiconductor device and manufacturing method therefor Public/Granted day:2017-09-19
Information query
IPC分类: