Invention Application
- Patent Title: CONTACT LINERS FOR INTEGRATED CIRCUITS AND FABRICATION METHODS THEREOF
- Patent Title (中): 用于集成电路的接触线及其制造方法
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Application No.: US14516674Application Date: 2014-10-17
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Publication No.: US20160111339A1Publication Date: 2016-04-21
- Inventor: Hui ZANG
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/321 ; H01L29/08 ; H01L21/285 ; H01L29/45 ; H01L27/092

Abstract:
Contact liners for integrated circuits and fabrication methods thereof are presented. The methods include: fabricating an integrated circuit structure having a first transistor having at least one of a p-type source region or a p-type drain region and a second transistor having at least one of an n-type source region or an n-type drain region, and the fabricating including: forming a contact liner at least partially over both the first transistor and the second transistor, the contact liner including a first contact liner material and a second contact liner material, wherein the first contact liner material is selected to facilitate electrical connection to the at least one p-type source region or p-type drain region of the first transistor, and the second contact liner material is selected to facilitate electrical connection to the at least one n-type source region or n-type drain region of the second transistor.
Public/Granted literature
- US09431303B2 Contact liners for integrated circuits and fabrication methods thereof Public/Granted day:2016-08-30
Information query
IPC分类: