Invention Application
US20160111422A1 METHOD FOR MAKING HIGH VOLTAGE INTEGRATED CIRCUIT DEVICES IN A FIN-TYPE PROCESS AND RESULTING DEVICES 有权
用于在FIN型工艺和结晶器件中制造高电压集成电路器件的方法

  • Patent Title: METHOD FOR MAKING HIGH VOLTAGE INTEGRATED CIRCUIT DEVICES IN A FIN-TYPE PROCESS AND RESULTING DEVICES
  • Patent Title (中): 用于在FIN型工艺和结晶器件中制造高电压集成电路器件的方法
  • Application No.: US14965193
    Application Date: 2015-12-10
  • Publication No.: US20160111422A1
    Publication Date: 2016-04-21
  • Inventor: Jagar SINGH
  • Applicant: GLOBALFOUNDRIES Inc.
  • Main IPC: H01L27/088
  • IPC: H01L27/088 H01L29/06 H01L29/08 H01L29/165
METHOD FOR MAKING HIGH VOLTAGE INTEGRATED CIRCUIT DEVICES IN A FIN-TYPE PROCESS AND RESULTING DEVICES
Abstract:
Methods for making high voltage IC devices utilizing a fin-type process and resulting devices are disclosed. Embodiments include forming two pluralities of silicon fins on a substrate layer, separated by a space, wherein adjacent silicon fins are separated by a trench; forming an oxide layer on the substrate layer and filling a portion of each trench; forming two deep isolation trenches into the oxide layer and the substrate layer adjacent to the two pluralities of silicon fins; forming a graded voltage junction by implanting a dopant into the substrate layer below the two pluralities of silicon fins; forming a gate structure on the oxide layer and between the two pluralities of silicon fins; implanting a dopant into and under the two pluralities of silicon fins, forming source and drain regions; and forming an epitaxial layer onto the two pluralities of silicon fins to form merged source and drain fins.
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