Invention Application
US20160114580A1 FLUID EJECTION DEVICE 有权
流体喷射装置

FLUID EJECTION DEVICE
Abstract:
A fluid ejection device is described. In an example, a device includes a substrate having a chamber formed thereon to contain a fluid. A metal layer includes a resistor under the chamber having a surface thermally coupled to the chamber. At least one layer is deposited on the metal layer. A polysilicon layer is under the metal layer comprising a polysilicon structure under the resistor to change topography of the resistor such that the surface is uneven.
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