FLUID EJECTION DEVICE
    7.
    发明申请
    FLUID EJECTION DEVICE 有权
    流体喷射装置

    公开(公告)号:US20160114580A1

    公开(公告)日:2016-04-28

    申请号:US14787233

    申请日:2013-07-29

    Abstract: A fluid ejection device is described. In an example, a device includes a substrate having a chamber formed thereon to contain a fluid. A metal layer includes a resistor under the chamber having a surface thermally coupled to the chamber. At least one layer is deposited on the metal layer. A polysilicon layer is under the metal layer comprising a polysilicon structure under the resistor to change topography of the resistor such that the surface is uneven.

    Abstract translation: 描述了流体喷射装置。 在一个示例中,装置包括具有形成在其上以容纳流体的腔室的基底。 金属层包括在腔室下面的电阻器,其具有热耦合到腔室的表面。 在金属层上沉积至少一层。 多晶硅层位于电阻器下方的包含多晶硅结构的金属层下,以改变电阻器的形貌,使得表面不均匀。

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