Invention Application
- Patent Title: PUMP, PUMP DEVICE, AND LIQUID SUPPLY SYSTEM
- Patent Title (中): 泵,泵装置和液体供应系统
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Application No.: US14918707Application Date: 2015-10-21
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Publication No.: US20160115952A1Publication Date: 2016-04-28
- Inventor: Takashi Sasa , Daisuke Ishimaru , Takahiro Okubo , Tomoyuki Yumoto , Tomohiko Muta
- Applicant: Tokyo Electron Limited
- Priority: JP2014-216312 20141023; JP2015-144946 20150722
- Main IPC: F04B43/08
- IPC: F04B43/08

Abstract:
A stay of a liquid can be suppressed. A pump 100 includes a tube 102, having elasticity, in which a liquid as a target to be delivered flows; a tube housing 104 which covers an outside of the tube 102 and keeps a gas in an inner space V between an outer surface of the tube 102 and the tube housing 104; and an electropneumatic regulator RE configured to supply the gas into the inner space V and discharge the gas from the inner space V.
Public/Granted literature
- US10655619B2 Pump, pump device, and liquid supply system Public/Granted day:2020-05-19
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