Invention Application
US20160125780A1 SENSORS EMPLOYING CONTROL SYSTEMS DETERMINING LOCATIONS OF MOVABLE DROPLETS WITHIN PASSAGEWAYS, AND RELATED METHODS
审中-公开
传感器采用控制系统确定可移动喷雾器在通道中的位置及相关方法
- Patent Title: SENSORS EMPLOYING CONTROL SYSTEMS DETERMINING LOCATIONS OF MOVABLE DROPLETS WITHIN PASSAGEWAYS, AND RELATED METHODS
- Patent Title (中): 传感器采用控制系统确定可移动喷雾器在通道中的位置及相关方法
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Application No.: US14883853Application Date: 2015-10-15
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Publication No.: US20160125780A1Publication Date: 2016-05-05
- Inventor: Robert Jan VISSER , Michel Anthony ROSA , Ananth DODABALAPUR
- Applicant: Applied Materials, Inc.
- Main IPC: G09G3/20
- IPC: G09G3/20 ; G01C9/10 ; G01P15/125

Abstract:
Sensors employing control systems determining locations of movable droplets within passageways, and related methods are disclosed. A sensor includes a movable droplet within a passageway supported on a substrate. The droplet may move to and from a quiescent point in the passageway which is at least partially formed by a hydrophobic layer. By including a hydrophobic layer having a hydrophobicity characteristic which decreases according to distance from the quiescent point, the droplet may move to a displacement position outside of the quiescent point in response to an external force. A control system of the sensor determines an acceleration and/or angular position of the sensor based on the displacement position. In this manner, a low cost sensor may be fabricated with without expensive nanostructures.
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