公开(公告)号：US20170250103A1

公开(公告)日：2017-08-31

申请号：US15513036

申请日：2015-09-17

Applicant: Applied Materials, Inc.

Inventor： Robert Jan VISSER ,  Sangmin JEONG ,  Ananth DODABALAPUR

IPC: H01L21/687 ,  C23C16/458 ,  C23C16/26 ,  C23C16/50

CPC classification number: H01L21/68757 ,  C23C16/26 ,  C23C16/458 ,  C23C16/50

Abstract: Embodiments described herein generally relate to methods and apparatuses for manufacturing devices. An improved substrate support assembly having a fluoro polymer layer disposed at one or more interfaces between a substrate and a susceptor and method for processing a substrate utilizing the same are provided. The fluoro polymer layer disposed at one or more interfaces between the substrate and the susceptor allows the substrate to adhere firmly to the susceptor, and allows the substrate and the susceptor to withstand greater shear forces, thus minimizing movement between the substrate and the susceptor.

公开(公告)号：US20160125780A1

公开(公告)日：2016-05-05

申请号：US14883853

申请日：2015-10-15

Applicant: Applied Materials, Inc.

Inventor： Robert Jan VISSER ,  Michel Anthony ROSA ,  Ananth DODABALAPUR

IPC: G09G3/20 ,  G01C9/10 ,  G01P15/125

CPC classification number: G09G3/20 ,  G01C9/10 ,  G01C22/006 ,  G01P15/006 ,  G01P15/125 ,  G01P15/18 ,  G09G2340/0492

Abstract: Sensors employing control systems determining locations of movable droplets within passageways, and related methods are disclosed. A sensor includes a movable droplet within a passageway supported on a substrate. The droplet may move to and from a quiescent point in the passageway which is at least partially formed by a hydrophobic layer. By including a hydrophobic layer having a hydrophobicity characteristic which decreases according to distance from the quiescent point, the droplet may move to a displacement position outside of the quiescent point in response to an external force. A control system of the sensor determines an acceleration and/or angular position of the sensor based on the displacement position. In this manner, a low cost sensor may be fabricated with without expensive nanostructures.

Abstract translation: 公开了采用确定通道内移动液滴的位置的控制系统的传感器以及相关方法。 传感器包括在支撑在基底上的通道内的可移动液滴。 液滴可以移动到至少部分由疏水层形成的通道中的静止点。 通过包括具有根据距离静止点的距离而减小的疏水性特征的疏水层，液滴可以响应于外力移动到静止点外部的位移位置。 传感器的控制系统基于位移位置确定传感器的加速度和/或角度位置。 以这种方式，可以在没有昂贵的纳米结构的情况下制造低成本传感器。