Invention Application
- Patent Title: LIGHT-TRANSMITTING CONDUCTIVE FILM, DISPLAY DEVICE, ELECTRONIC DEVICE, AND MANUFACTURING METHOD OF LIGHT-TRANSMITTING CONDUCTIVE FILM
- Patent Title (中): 透光导电膜，显示装置，电子装置及发光导体膜的制造方法
-
Application No.: US14993395Application Date: 2016-01-12
-
Publication No.: US20160125969A1Publication Date: 2016-05-05
- Inventor: Junichi KOEZUKA , Tetsunori MARUYAMA , Takayuki SAITO , Yuki IMOTO , Noriaki UTO , Yuta ENDO , Hitomi SHIONOYA , Takuya HIROHASHI , Shunpei YAMAZAKI
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: JP2009-123433 20090521; JP2009-136538 20090605
- Main IPC: H01B1/02
- IPC: H01B1/02
Abstract:
An object is to provide a transparent conductive film having favorable transparency and conductivity at low cost. Another object is to reduce the resistivity of a transparent conductive film formed using conductive oxynitride including zinc and aluminum. Another object is to provide a transparent conductive film that is formed using conductive oxynitride including zinc and aluminum. When aluminum and nitrogen are made to be included in a transparent conductive film formed using oxide including zinc to form a transparent conductive film that is formed using conductive oxynitride including zinc and aluminum, the transparent conductive film can have reduced resistivity. Heat treatment after the formation of the transparent conductive film that is formed using conductive oxynitride including zinc and aluminum enables reduction in resistivity of the transparent conductive film.
Information query
