Invention Application
- Patent Title: PLASMA PROCESSING APPARATUS
- Patent Title (中): 等离子体加工设备
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Application No.: US14933911Application Date: 2015-11-05
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Publication No.: US20160126063A1Publication Date: 2016-05-05
- Inventor: Jun YAMAWAKU , Tatsui MATSUDO , Chishio KOSHUMIZU
- Applicant: Tokyo Electron Limited
- Priority: JP2014-225241 20141105
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing apparatus includes a plasma generation unit configured to convert a processing gas supplied into a processing chamber into plasma by an inductive coupling. The plasma generation unit includes a first high frequency antenna formed of a vortex coil arranged adjacent to the processing chamber through a dielectric window, a second high frequency antenna having a natural resonant frequency and formed of a vortex coil arranged at an outer or inner peripheral side of the first high frequency antenna, and an impedance adjustment unit for adjusting a resonant frequency of a circuit viewed from the high frequency power supply toward the first high frequency antenna. The circuit viewed from the high frequency power supply toward the first high frequency antenna is configured to have two resonant frequencies depending on adjustment of the impedance adjustment unit when a frequency of high frequency power is changed.
Public/Granted literature
- US10325758B2 Plasma processing apparatus Public/Granted day:2019-06-18
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