发明申请
- 专利标题: SUBSTRATE PLATING DEVICE
- 专利标题(中): 基板镀层器件
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申请号: US14889954申请日: 2014-03-27
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公开(公告)号: US20160138181A1公开(公告)日: 2016-05-19
- 发明人: Junichiro YOSHIOKA , Takashi MURAYAMA
- 申请人: JCU CORPORATION
- 申请人地址: JP Taito-ku, Tokyo
- 专利权人: JCU CORPORATION
- 当前专利权人: JCU CORPORATION
- 当前专利权人地址: JP Taito-ku, Tokyo
- 优先权: JP2013-101338 20130513
- 国际申请: PCT/JP2014/058713 WO 20140327
- 主分类号: C25D21/10
- IPC分类号: C25D21/10 ; C25D17/00
摘要:
A plating device includes a pl,ting bath containing therein a plating solution, a substrate holder for detachably holding a substrate, an anode disposed opposite to the substrate held by the substrate holder, a rail part stretched across an upper portion of the plating bath in parallel to the substrate holder, and a paddle suspended by the rail part and capable of reciprocating along the rail part. The paddle is vertically provided with a vane part rotatable round or pivotable on an axis part. The plating device can increase flow rate of a plating solution without installing a circulating pump outside a plating bath, and further can achieve same flow rate of the plating solution from a bottom of the plating bath to a level of the solution, enabling plating that forms a plating film having a uniform thickness on an entire region of a substrate and exhibits a high deposition rate.
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