发明申请
US20160138181A1 SUBSTRATE PLATING DEVICE 审中-公开
基板镀层器件

  • 专利标题: SUBSTRATE PLATING DEVICE
  • 专利标题(中): 基板镀层器件
  • 申请号: US14889954
    申请日: 2014-03-27
  • 公开(公告)号: US20160138181A1
    公开(公告)日: 2016-05-19
  • 发明人: Junichiro YOSHIOKATakashi MURAYAMA
  • 申请人: JCU CORPORATION
  • 申请人地址: JP Taito-ku, Tokyo
  • 专利权人: JCU CORPORATION
  • 当前专利权人: JCU CORPORATION
  • 当前专利权人地址: JP Taito-ku, Tokyo
  • 优先权: JP2013-101338 20130513
  • 国际申请: PCT/JP2014/058713 WO 20140327
  • 主分类号: C25D21/10
  • IPC分类号: C25D21/10 C25D17/00
SUBSTRATE PLATING DEVICE
摘要:
A plating device includes a pl,ting bath containing therein a plating solution, a substrate holder for detachably holding a substrate, an anode disposed opposite to the substrate held by the substrate holder, a rail part stretched across an upper portion of the plating bath in parallel to the substrate holder, and a paddle suspended by the rail part and capable of reciprocating along the rail part. The paddle is vertically provided with a vane part rotatable round or pivotable on an axis part. The plating device can increase flow rate of a plating solution without installing a circulating pump outside a plating bath, and further can achieve same flow rate of the plating solution from a bottom of the plating bath to a level of the solution, enabling plating that forms a plating film having a uniform thickness on an entire region of a substrate and exhibits a high deposition rate.
信息查询
0/0