Invention Application
- Patent Title: THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF
- Patent Title (中): 薄膜晶体管阵列及其制造方法
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Application No.: US15010497Application Date: 2016-01-29
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Publication No.: US20160148958A1Publication Date: 2016-05-26
- Inventor: Do-Hyun KIM , Yoon Ho KHANG , Dong-Hoon LEE , Sang Ho PARK , Se Hwan YU , Cheol Kyu KIM , Yong-Su LEE , Sung Haeng CHO , Chong Sup CHANG , Dong Jo KIM , Jung Kyu LEE
- Applicant: Samsung Display Co., Ltd.
- Priority: KR10-2011-0077021 20110802
- Main IPC: H01L27/12
- IPC: H01L27/12
Abstract:
A thin film transistor array panel includes: a gate wiring layer disposed on a substrate; an oxide semiconductor layer disposed on the gate wiring layer; and a data wiring layer disposed on the oxide semiconductor layer, in which the data wiring layer includes a main wiring layer including copper and a capping layer disposed on the main wiring layer and including a copper alloy.
Public/Granted literature
- US09589998B2 Thin film transistor array panel and manufacturing method thereof Public/Granted day:2017-03-07
Information query
IPC分类:
