Invention Application
US20160153856A1 ELECTRONIC DEVICE, PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, VIBRATOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
审中-公开
电子设备，物理量传感器，压力传感器，振动器，高度计，电子设备和移动物体
- Patent Title: ELECTRONIC DEVICE, PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, VIBRATOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
- Patent Title (中): 电子设备，物理量传感器，压力传感器，振动器，高度计，电子设备和移动物体
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Application No.: US14951996Application Date: 2015-11-25
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Publication No.: US20160153856A1Publication Date: 2016-06-02
- Inventor: Kazuya HAYASHI
- Applicant: Seiko Epson Corporation
- Priority: JP2014-242323 20141128
- Main IPC: G01L9/00
- IPC: G01L9/00 ; H03H9/24 ; G01C5/06
Abstract:
A physical quantity sensor includes a substrate, a piezoresistive element that is arranged on one face side of the substrate, a wall portion that is arranged to surround the piezoresistive element on the one face side of the substrate in a plan view of the substrate, a ceiling portion that is arranged on the opposite side of the wall portion from the substrate and constitutes a cavity portion with the wall portion, and an inside beam portion that is arranged on the substrate side of the ceiling portion and includes a material of which the thermal expansion rate is smaller than the thermal expansion rate of the ceiling portion.
Information query
