Invention Application
- Patent Title: POSITION FEEDBACK FOR SEALED ENVIRONMENTS
- Patent Title (中): 密封环境的位置反馈
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Application No.: US14540058Application Date: 2014-11-13
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Publication No.: US20160164382A1Publication Date: 2016-06-09
- Inventor: Jairo T. MOURA , Reza SAEIDPOURAZAR , Branden Gunn , Matthew W. Coady , Ulysses Gilchrist
- Applicant: BROOKS AUTOMATION, INC.
- Main IPC: H02K11/215
- IPC: H02K11/215 ; H01L21/687 ; H02K1/14 ; H01L21/677 ; H02K5/128 ; H02K1/24

Abstract:
A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.
Public/Granted literature
- US10742092B2 Position feedback for sealed environments Public/Granted day:2020-08-11
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