公开(公告)号：US20160164382A1

公开(公告)日：2016-06-09

申请号：US14540058

申请日：2014-11-13

Applicant: BROOKS AUTOMATION, INC.

Inventor： Jairo T. MOURA ,  Reza SAEIDPOURAZAR ,  Branden Gunn ,  Matthew W. Coady ,  Ulysses Gilchrist

IPC: H02K11/215 ,  H01L21/687 ,  H02K1/14 ,  H01L21/677 ,  H02K5/128 ,  H02K1/24

Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.

Abstract translation: 一种运输装置，包括壳体，安装到壳体的驱动器和连接到驱动器的至少一个输送臂，其中驱动器包括至少一个转子，该转子具有至少一个磁性可渗透材料的凸极并且设置在隔离环境中， 至少一个定子具有至少一个具有对应的线圈单元的凸极并且设置在所述隔离环境的外部，其中所述至少一个定子的至少一个凸极和所述转子的所述至少一个凸极形成闭合磁通电路， 所述至少一个转子和所述至少一个定子，被配置为隔离所述隔离环境的至少一个密封分隔件，以及包括连接到所述壳体的磁性传感器构件的至少一个传感器，连接到所述至少一个的至少一个传感器轨道 转子，其中所述至少一个密封分隔件设置在所述磁性传感器构件和所述至少一个传感器轨道之间，并且使所述至少一个感测体 r轨道设置在隔离环境中，并且磁传感器构件设置在隔离环境的外部。

公开(公告)号：US10742092B2

公开(公告)日：2020-08-11

申请号：US14540058

申请日：2014-11-13

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. Moura ,  Reza Saeidpourazar ,  Branden Gunn ,  Matthew W. Coady ,  Ulysses Gilchrist

IPC: H02K11/215 ,  H01L21/687 ,  H02K1/14 ,  H01L21/677 ,  H02K5/128 ,  H02K1/24 ,  H01L21/67

Abstract: A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.