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公开(公告)号：US20160129586A1
公开(公告)日：2016-05-12
申请号：US14937676
申请日：2015-11-10
发明人： Jairo T. MOURA , Aaron GAWLIK , Reza SAEIDPOURAZAR
IPC分类号： B25J9/00 , B25J11/00 , H01L21/67 , H01L21/687
CPC分类号： H01L21/67742 , H01L21/67265 , H01L21/67294 , H01L21/67766 , H01L21/67778 , H01L21/68 , H01L21/68707
摘要： A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
摘要翻译： 一种用于自动教导衬底站位置的衬底传送装置自动教学系统，所述系统包括框架，连接到框架的衬底传送器，具有构造成支撑衬底的端部执行器的衬底传送器以及被配置为移动 衬底传输，使得衬底传输使支撑在端部执行器上的衬底相对于衬底台特征偏置，导致衬底和端部执行器之间的偏心度的变化，确定偏心率的变化，并且至少基于至少 底物与末端执行器之间偏心度的变化。
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公开(公告)号：US20210265188A1
公开(公告)日：2021-08-26
申请号：US17180298
申请日：2021-02-19
发明人： Jairo T. MOURA , Roumen Botev
IPC分类号： H01L21/677 , H02N15/00 , H02K41/025 , B65G54/02 , B65G35/06 , G05D3/12
摘要： A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet. At least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane.
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公开(公告)号：US20190164800A1
公开(公告)日：2019-05-30
申请号：US16197087
申请日：2018-11-20
发明人： Bing YIN , Jairo T. MOURA , Vincent TSANG , Aaron GAWLIK , Nathan SPIKER
IPC分类号： H01L21/68 , H01L21/687
摘要： A Substrate processing apparatus including a wafer transport apparatus with a transport arm including an end effector, an arm pose deterministic feature integral to the substrate transport apparatus and disposed so that a static detection sensor of the substrate processing apparatus detects at least one edge of the at least one arm pose deterministic feature on the fly with radial motion of the transport arm, and a controller configured so that detection of the edge effects a determination of a proportion factor identifying at least a thermal expansion variance of the transport arm on the fly and includes a kinematic effects resolver configured to determine, from the detection of the edge on the fly, a discrete relation between the determined proportion factor and each different discrete variance respective to each different link of the transport arm determining at least the thermal expansion variance of the transport arm on the fly.
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公开(公告)号：US20190143521A1
公开(公告)日：2019-05-16
申请号：US15971827
申请日：2018-05-04
发明人： Aaron GAWLIK , Jairo T. MOURA
摘要： A method for health assessment of a system including a transport apparatus including registering predetermined operating data embodying at least one dynamic performance variable output by the transport apparatus, determining a base value (CpkBase) characterized by a probability density function of each of the dynamic performance variable output, resolving from the transport apparatus in situ process motion commands of the apparatus controller and defining another predetermined motion set of the transport apparatus, registering predetermined operating data embodying the at least one dynamic performance variable output by the transport apparatus and determining with the processor another value (CpkOther) characterized by the probability density function of each of the dynamic performance variable output by the transport apparatus, and comparing the other value and the base value (CpkBase) for each of the dynamic performance variable output by the transport apparatus respectively corresponding to the predetermined motion base set and the other predetermined motion set.
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公开(公告)号：US20190027389A1
公开(公告)日：2019-01-24
申请号：US16011978
申请日：2018-06-19
发明人： Jairo T. MOURA , Aaron GAWLIK , Reza SAEIDPOURAZAR
IPC分类号： H01L21/677 , H01L21/687 , H01L21/68 , H01L21/67
CPC分类号： H01L21/67742 , H01L21/67265 , H01L21/67294 , H01L21/67766 , H01L21/67778 , H01L21/68 , H01L21/68707
摘要： A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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公开(公告)号：US20180286728A1
公开(公告)日：2018-10-04
申请号：US15880387
申请日：2018-01-25
IPC分类号： H01L21/677 , H01L21/67 , G05B19/418 , B25J9/12 , B25J9/16
摘要： A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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公开(公告)号：US20200256919A1
公开(公告)日：2020-08-13
申请号：US16793623
申请日：2020-02-18
摘要： A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.
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公开(公告)号：US20180138066A1
公开(公告)日：2018-05-17
申请号：US15849002
申请日：2017-12-20
IPC分类号： H01L21/677 , B25J18/04 , B25J9/04 , B25J11/00
CPC分类号： H01L21/67706 , B25J9/042 , B25J9/043 , B25J11/0095 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10S901/27 , Y10T74/20305 , Y10T74/20329
摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.
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公开(公告)号：US20150139770A1
公开(公告)日：2015-05-21
申请号：US14540072
申请日：2014-11-13
CPC分类号： H02K5/128 , B25J11/0095 , H02K1/14 , H02K1/141 , H02K1/148 , H02K1/24 , H02K1/246 , H02K11/21 , H02K19/103
摘要： A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.
摘要翻译： 一种运输装置，包括壳体，安装到壳体的驱动器和连接到驱动器的至少一个运输臂，其中驱动器包括至少一个转子，该转子具有至少一个磁性可渗透材料的凸极并设置在隔离的环境中， 至少一个定子具有至少一个具有相应线圈单元的凸极并且设置在隔离环境之外，其中至少一个定子的至少一个凸极和转子的至少一个凸极在其间形成闭合磁通电路， 所述至少一个转子和所述至少一个定子以及至少一个密封件构造成隔离所述隔离环境，其中所述至少一个密封件与所述至少一个定子成一体。
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公开(公告)号：US20220172973A1
公开(公告)日：2022-06-02
申请号：US17651183
申请日：2022-02-15
IPC分类号： H01L21/677 , H01L21/68 , B25J9/00 , B25J11/00 , B25J9/10 , H01L21/67 , B25J9/12 , B25J9/16 , G05B19/418
摘要： A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
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