发明申请
- 专利标题: BRUSH COMPOSITION AND METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE
- 专利标题(中): 刷式组合物和生产包含相分离结构的结构的方法
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申请号: US14957994申请日: 2015-12-03
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公开(公告)号: US20160194524A1公开(公告)日: 2016-07-07
- 发明人: Hitoshi YAMANO , Tasuku MATSUMIYA , Masahito YAHAGI , Tsuyoshi KUROSAWA , Ken MIYAGI
- 申请人: TOKYO OHKA KOGYO CO., LTD.
- 优先权: JP2014-246801 20141205
- 主分类号: C09J5/00
- IPC分类号: C09J5/00 ; B05D1/36 ; B05D3/04 ; C09J125/14 ; B05D7/00
摘要:
A brush composition used for phase-separation of a layer containing a block copolymer on a substrate, the brush composition including a resin component (N), the resin component (N) containing a hydrophobic structural unit (Nx) and a hydrophilic structural unit (Ny), the amount of the structural unit (Ny) within the resin component (N) being 5 mol % or less.
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