Invention Application
- Patent Title: MAGNETIC SENSOR ELEMENT
- Patent Title (中): 磁传感器元件
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Application No.: US14911695Application Date: 2013-09-09
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Publication No.: US20160202330A1Publication Date: 2016-07-14
- Inventor: Hiroyuki YAMAMOTO , Akihiko KANDORI , Katsuya MIURA
- Applicant: HITACHI, LTD.
- Applicant Address: JP Chiyoda-ku, Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Chiyoda-ku, Tokyo
- International Application: PCT/JP2013/074223 WO 20130909
- Main IPC: G01R33/09
- IPC: G01R33/09 ; H01L43/08

Abstract:
Provided is a magnetic sensor device having a structure in which a plurality of MTJ structures, each using a ferromagnetic layer having an in-plane axis of easy magnetization and a ferromagnetic layer having a perpendicular axis of easy magnetization, are laminated. By a single device, magnetic fields in two or more directions can be sensed, or a plurality of magnetic field ranges including a small magnetic field and a relatively large magnetic field can be sensed.
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