公开(公告)号：US20170362082A1

公开(公告)日：2017-12-21

申请号：US15610987

申请日：2017-06-01

Applicant: HITACHI, LTD.

Inventor： Keiji WATANABE ,  Shuntaro MACHIDA ,  Katsuya MIURA ,  Aki TAKEI ,  Tetsufumi KAWAMURA ,  Nobuyuki SUGII ,  Daisuke RYUZAKI

IPC: B81C1/00 ,  B81C99/00

CPC classification number: B81C1/00531 ,  B05D3/064 ,  B81C99/0025 ,  B81C2201/0132 ,  B81C2201/0136 ,  B81C2201/0143 ,  Y10S148/042 ,  Y10S438/924

Abstract: First, an ion beam is applied to a workpiece to form a tapered hole the side wall of which is inclined. Next, the application of the ion beam is stopped, and then a material gas is introduced from the gas source to the upper surface of the workpiece from an oblique direction to cause gas molecules to be adsorbed to the upper surface of the workpiece and to the upper portion of the side wall of the hole. Next, introduction of the material gas is stopped, and then the ion beam is applied again to the region of the workpiece where the hole is formed. As a result, at the upper portion of the side wall of the hole, film formation occurs using the gas molecules as the material adsorbed to the side wall of the hole, and, at the bottom portion of the hole, etching of the workpiece occurs.

公开(公告)号：US20160202330A1

公开(公告)日：2016-07-14

申请号：US14911695

申请日：2013-09-09

Applicant: HITACHI, LTD.

Inventor： Hiroyuki YAMAMOTO ,  Akihiko KANDORI ,  Katsuya MIURA

IPC: G01R33/09 ,  H01L43/08

CPC classification number: H01F10/3286 ,  G01R33/093 ,  G01R33/098 ,  H01L43/08

Abstract: Provided is a magnetic sensor device having a structure in which a plurality of MTJ structures, each using a ferromagnetic layer having an in-plane axis of easy magnetization and a ferromagnetic layer having a perpendicular axis of easy magnetization, are laminated. By a single device, magnetic fields in two or more directions can be sensed, or a plurality of magnetic field ranges including a small magnetic field and a relatively large magnetic field can be sensed.

Abstract translation: 提供了一种磁传感器装置，其结构是将多个MTJ结构层叠在一起，每个MTJ结构使用具有容易磁化的面内轴的铁磁层和具有易磁化的垂直轴的铁磁层。 通过单个装置，可以检测两个或更多个方向的磁场，或者可以感测到包括小磁场和相对大的磁场的多个磁场范围。

公开(公告)号：US20160105176A1

公开(公告)日：2016-04-14

申请号：US14893060

申请日：2013-05-22

Applicant: HITACHI, LTD.

Inventor： Katsuya MIURA ,  Susumu OGAWA ,  Kenchi ITO ,  Masaki YAMADA

IPC: H03K19/00 ,  H01L43/02 ,  H03K3/356 ,  H03L7/00 ,  H03K19/18 ,  H01L43/08 ,  H01L27/22

CPC classification number: H03K19/0016 ,  G11C11/14 ,  G11C11/161 ,  G11C11/1659 ,  G11C11/1673 ,  G11C11/1675 ,  G11C11/1693 ,  H01L27/22 ,  H01L29/1029 ,  H01L29/66984 ,  H01L29/82 ,  H01L43/02 ,  H01L43/08 ,  H03K3/356 ,  H03K19/16 ,  H03K19/18 ,  H03L7/00

Abstract: As a technique for attaining a reduction in power consumption, there is a technique for reducing power consumption using a spin wave. No specific proposal concerning spin wave generation, spin wave detection, and a latch technique for information has been made.A device applies an electric field to a first electrode of a nonmagnetic material using a thin line-shaped stacked body including a first ferromagnetic layer and a nonmagnetic layer to thereby generate a spin wave in the first ferromagnetic layer, and detects a phase or amplitude of the spin wave propagated in the first ferromagnetic layer using a second electrode of a ferromagnetic material with a magnetoresistance effect.

Abstract translation: 作为降低功耗的技术，存在使用自旋波降低功耗的技术。 没有关于自旋波产生，自旋波检测和用于信息的锁存技术的具体提案。 一种器件使用包括第一铁磁层和非磁性层的细线状堆叠体将电场施加到非磁性材料的第一电极，从而在第一铁磁层中产生自旋波，并且检测相位或振幅 旋转波在第一铁磁层中使用具有磁阻效应的铁磁材料的第二电极传播。