Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
- Patent Title (中): 半导体器件
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Application No.: US15077105Application Date: 2016-03-22
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Publication No.: US20160202473A1Publication Date: 2016-07-14
- Inventor: Ryohei UCHINO , Gen MATSUOKA
- Applicant: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Priority: JP2013-231045 20131107
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00

Abstract:
A mirror device includes a frame body, a mirror configured to tilt about a Y-axis with respect to the frame body, a fixed inner comb electrode including a plurality of electrode fingers arranged in the arrangement direction along the Y-axis and provided at the frame body, and a movable inner comb electrode including a plurality of electrode fingers arranged in the arrangement direction and provided at the mirror, the electrodes fingers of the fixed inner comb electrode and the movable inner comb electrode being alternately arranged. The mirror includes a mirror body and an extension extending from the mirror body. Some of the electrode fingers of the movable inner comb electrode are provided at the mirror body, and another electrode fingers of the movable inner comb electrode are provided at the extension.
Public/Granted literature
- US10513430B2 Semiconductor device Public/Granted day:2019-12-24
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