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公开(公告)号：US20230358539A1
公开(公告)日：2023-11-09
申请号：US18002961
申请日：2021-06-24
发明人： Ryohei UCHINO , Takafumi MORIGUCHI , Naoki OKIMOTO
IPC分类号： G01C19/5684
CPC分类号： G01C19/5684
摘要： A vibrating-type gyroscope element includes a fixed part, a resonator having a vibration mode of cos Nθ (N is a natural number of two or more), support parts-30, and electrodes. The electrodes are arranged in 4N orientations arranged in an outer circumferential direction of the resonator. The electrodes include at least one primary driving electrode-PD and at least one secondary pickoff electrode. A relationship U ≥ 1 or (S1 + S2) - 2 ≥ |S1 - S2| is satisfied, where S1 is the number of cases where a secondary pickoff electrode is clockwise adjacent to a primary driving electrode, S2 is the number of cases where a secondary pickoff electrode is anticlockwise adjacent to a primary driving electrode, and U is the number of the secondary pickoff electrodes being neither clockwise nor anticlockwise adjacent to a primary driving electrode.
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公开(公告)号：US20170357075A1
公开(公告)日：2017-12-14
申请号：US15524919
申请日：2015-11-13
发明人： Ryohei UCHINO
CPC分类号： G02B7/003 , B81B3/0045 , B81B2201/033 , B81B2203/051 , G02B7/023 , G02B26/085 , G02B26/0858 , G03F7/70266
摘要： An optical filter device (1000) includes: a first mirror (101) transmitting portion of incident light; a second mirror (201) spaced apart from the first mirror (101), and transmitting portion of the incident light; actuators (300) driving the first mirror (101) to change a space between the first mirror (101) and the second mirror (201); and a detection electrode (400) detecting displacement of the first mirror (101). The detection electrode (400) includes: a movable comb electrode (410) including movable combs (414) and connected to the first mirror (101); and a stationary comb electrode (420) including stationary combs (424) facing the movable combs (414) in parallel with each other. The movable combs (414) are displaced in parallel with the stationary combs (424) when the movable comb electrode (410) is displaced together with the first mirror (101).
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公开(公告)号：US20230243653A1
公开(公告)日：2023-08-03
申请号：US18002823
申请日：2021-06-24
发明人： Ryohei UCHINO , Takafumi MORIGUCHI , Naoki OKIMOTO
IPC分类号： G01C19/5684 , B81B3/00
CPC分类号： G01C19/5684 , B81B3/0086 , B81B2201/0242 , B81B2203/04
摘要： A vibratory gyro element 100 includes a fixed part 10, a resonator 20 having a cos Nθ (N is a natural number of two or more) mode of vibration, support parts 30, and electrodes 40. The electrodes 40 are arranged in 4N orientations arranged in an outer circumferential direction of the resonator 20. The electrodes 40 include a primary driving electrode PD, a primary pickoff electrode PPO, a secondary pickoff electrode SPO, and a secondary driving electrode SD. The primary pickoff electrode PPO is arranged in the same orientation as that of the primary driving electrode PD, and the secondary driving electrode SD is arranged in the same orientation as that of the secondary pickoff electrode SPO.
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公开(公告)号：US20190064505A1
公开(公告)日：2019-02-28
申请号：US16081912
申请日：2017-03-17
发明人： Mario KIUCHI , Ryohei UCHINO , Tomonori MORI
摘要： A displacement increasing mechanism has a fixing portion, first and second actuators coupled to the fixing portion, a first beam having first and second end portions and coupled to the first actuator at the first end portion, a second beam having third and fourth end portions and coupled to the second actuator 4 at the third end portion, and a drive target member coupled to a parallel arrangement portion at which the first and second beams are arranged in parallel with each other. The first actuator is driven to pull the first beam from a second end portion side in the direction of extending the first beam, and the second actuator is driven to push the second beam form a fourth end portion side in the direction of extending the second beam.
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公开(公告)号：US20170005257A1
公开(公告)日：2017-01-05
申请号：US15265288
申请日：2016-09-14
发明人： Ryohei UCHINO , Osamu TORAYASHIKI , Akio MUGISHIMA
IPC分类号： H01L41/09 , H01L41/047 , G02B26/08 , H01L41/083
CPC分类号： H01L41/09 , B81B3/0045 , B81B2201/042 , B81B2203/058 , G02B26/0858 , H01L41/047 , H01L41/083
摘要： A mirror device 200 disclosed herein includes a base 202, a mirror 205, an actuator 206, a fixed comb electrode 208, and a movable comb electrode 207. The movable comb electrode 207 includes: a beam portion 271; a hinge 273 configured to couple the beam portion 271 to the actuator 206 and having lower rigidity than the beam portion 271; a hinge 274 configured to couple the beam portion 271 to the base 202 and having lower rigidity than the beam portion 271; and electrode fingers 272, 272, . . . provided for the beam portion 271 and facing electrode fingers 281, 281, . . . of the fixed comb electrode 208. The movable comb electrode 207 is configured to tilt around a tilt axis B5 that passes through the hinge 274.
摘要翻译： 本文公开的镜装置200包括基座202，反射镜205，致动器206，固定梳电极208和可动梳状电极207.可动梳状电极207包括：梁部分271; 铰链273，其被构造成将梁部分271耦合到致动器206并具有比梁部分271低的刚性; 铰链274，其构造成将梁部分271耦合到基部202并且具有比梁部分271更低的刚度; 和电极指272,272，...。 。 。 提供用于梁部分271和面对的电极指281,281，。 。 。 固定梳状电极208.可动梳状电极207构造成围绕穿过铰链274的倾斜轴线B5倾斜。
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公开(公告)号：US20200300628A1
公开(公告)日：2020-09-24
申请号：US16649474
申请日：2018-09-18
发明人： Ryohei UCHINO , Takashi IKEDA
IPC分类号： G01C19/5684 , B81B3/00 , G01C19/5719 , H01L29/84
摘要： An angular rate sensor includes an annular resonator. The resonator includes an annular base material made of a first material, and an annular first low thermal conductor made of a second material having a lower thermal conductivity than the first material, the first low thermal conductor being sandwiched between an annular first region and an annular second region on an inner side of the first region in the base material over substantially an entire circumference of the resonator.
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公开(公告)号：US20170003500A1
公开(公告)日：2017-01-05
申请号：US15265323
申请日：2016-09-14
发明人： Ryohei UCHINO
IPC分类号： G02B26/08 , H01L41/053
CPC分类号： G02B26/0858 , B81B3/0048 , B81B2201/032 , B81B2201/033 , B81B2201/042 , B81B2203/058 , G02B26/0841 , H01L41/053 , H01L41/094
摘要： A mirror device 300 disclosed herein includes: a base 302; a mirror 305; an actuator 306; an extension 304 provided on the other side of the mirror 305 with respect to an X-axis opposite from the actuator 306; a fixed comb electrode 308; and a movable comb electrode 307 provided on the other side of the mirror 305 with respect to the X-axis opposite from the actuator 306. The movable comb electrode 307 includes: a beam portion 371 coupled to the mirror 305 via a hinge 373; and electrode fingers 372 provided for the beam portion 371. The extension 304 is coupled to the base 302 via a hinge 341, and the mirror 305 tilts around a principal axis passing through the hinge 341.
摘要翻译： 本文公开的镜装置300包括：基座302; 镜子305; 致动器306; 相对于与致动器306相对的X轴设置在反射镜305的另一侧上的延伸部304; 固定梳电极308; 以及相对于与致动器306相对的X轴设置在反射镜305的另一侧上的可动梳状电极307.可动梳状电极307包括：经由铰链373联接到反射镜305的梁部分371; 以及为梁部分371提供的电极指372.延伸部分304经由铰链341连接到基座302，并且反射镜305围绕穿过铰链341的主轴线倾斜。
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公开(公告)号：US20160202473A1
公开(公告)日：2016-07-14
申请号：US15077105
申请日：2016-03-22
发明人： Ryohei UCHINO , Gen MATSUOKA
CPC分类号： B81C1/00492 , B81B3/0086 , B81B2201/042 , B81B2203/0136 , B81C1/00404 , B81C1/00603 , B81C2201/0102 , B81C2201/0132 , B81C2201/0198 , G02B26/0841
摘要： A mirror device includes a frame body, a mirror configured to tilt about a Y-axis with respect to the frame body, a fixed inner comb electrode including a plurality of electrode fingers arranged in the arrangement direction along the Y-axis and provided at the frame body, and a movable inner comb electrode including a plurality of electrode fingers arranged in the arrangement direction and provided at the mirror, the electrodes fingers of the fixed inner comb electrode and the movable inner comb electrode being alternately arranged. The mirror includes a mirror body and an extension extending from the mirror body. Some of the electrode fingers of the movable inner comb electrode are provided at the mirror body, and another electrode fingers of the movable inner comb electrode are provided at the extension.
摘要翻译： 反射镜装置包括框架体，配置成相对于框架体围绕Y轴倾斜的反射镜，固定的内梳状电极，包括沿着Y轴布置在排列方向上的多个电极指， 框体和可动内梳状电极，其包括沿着排列方向布置并设置在反射镜处的多个电极指，固定内梳电极和可移动内梳电极的电极指交替布置。 镜子包括镜体和从镜体延伸的延伸部分。 可动内梳电极的一些电极指设置在镜体上，可移动内梳电极的另一电极指在延伸部处设置。
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公开(公告)号：US20160025964A1
公开(公告)日：2016-01-28
申请号：US14777061
申请日：2013-11-25
发明人： Osamu TORAYASHIKI , Ryohei UCHINO , Tokiko MISAKI
IPC分类号： G02B26/08
CPC分类号： G02B26/0816 , G02B6/356 , G02B26/0858
摘要： A mirror device 100 includes a mirror 131, an actuator 104 tilting the mirror 131, a first hinge 105 coupling the mirror 131 to the actuator 104, a base 102, a second hinge 106 coupling the mirror 131 to the base 102, a movable comb electrode 107 coupled to the mirror 131, and a fixed comb electrode 108 fixed to the base 102. The actuator 104 is controlled based on a capacitance between the movable comb electrode 107 and the fixed comb electrode 108. The movable comb electrode 107 is disposed on a portion of the mirror 131 closer to the second hinge 106 than to the first hinge 105.
摘要翻译： 反射镜装置100包括反射镜131，使反射镜131倾斜的致动器104，将反射镜131连接到致动器104的第一铰链105，基座102，将反射镜131连接到基座102的第二铰链106，可移动梳 耦合到反射镜131的电极107和固定在基座102上的固定梳状电极108.基于可动梳状电极107和固定梳状电极108之间的电容来控制致动器104.可动梳状电极107设置在 反射镜131的比第一铰链105更靠近第二铰链106的部分。
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