Invention Application
US20160209748A1 LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM 有权
液体加工方法,液体加工设备和记录介质

  • Patent Title: LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM
  • Patent Title (中): 液体加工方法,液体加工设备和记录介质
  • Application No.: US14963831
    Application Date: 2015-12-09
  • Publication No.: US20160209748A1
    Publication Date: 2016-07-21
  • Inventor: Takafumi HASIMOTOShinichi HATAKEYAMANaoki SHIBATA
  • Applicant: Tokyo Electron Limited
  • Priority: JP2015-006032 20150115
  • Main IPC: G03F7/16
  • IPC: G03F7/16
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM
Abstract:
There are provided a liquid processing method, a liquid processing apparatus and a recording medium for liquid processing which can enhance the uniformity of the coating state of a processing liquid on a substrate. A coating unit U1 includes a rotary holder 20 for rotating a wafer W, a nozzle 32 for supplying a processing liquid R onto a surface Wa of the wafer W, and a controller 60 for controlling the position of the nozzle 32 with respect to the wafer W. A liquid processing method includes: starting the supply of the processing liquid R to the surface Wa of the wafer W at an eccentric position at a distance from the center CL1 of rotation of the wafer W, and moving the position on the wafer W to which the processing liquid R is supplied toward the center CL1 of rotation of the wafer W while rotating the wafer W at a first rotational speed ω1; and, after the processing liquid supply position has reached the center CL1 of rotation of the wafer W, rotating the wafer W at a second rotational speed ω2 which is higher than the first rotational speed ω1, thereby allowing the processing liquid R to spread toward the periphery of the wafer W.
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