A reliability screen of integrated circuits including ferroelectric random access memory (FRAM) arrays for stuck bits. The FRAM devices are subjected to a high temperature bake in wafer form. A “shmoo” of the reference voltage is performed, at an elevated temperature, for each device to identify a first reference voltage at which a first cell in the device fails a read of its low polarization capacitance data state, and a second reference voltage at which a selected number of cells in the device fail the read. The slope of the line between the first and second reference voltages, in the cumulative fail bit count versus reference voltage plane, is compared with a slope limit to determine whether any stuck bits are present in the device.