发明申请
US20160245732A1 PREPARATION OF SAMPLE FOR CHARGED-PARTICLE MICROSCOPY 有权
填充颗粒显微镜样品的制备

  • 专利标题: PREPARATION OF SAMPLE FOR CHARGED-PARTICLE MICROSCOPY
  • 专利标题(中): 填充颗粒显微镜样品的制备
  • 申请号: US15052313
    申请日: 2016-02-24
  • 公开(公告)号: US20160245732A1
    公开(公告)日: 2016-08-25
  • 发明人: Hervé-William Rémigy
  • 申请人: FEI Company
  • 申请人地址: US OR Hillsboro
  • 专利权人: FEI Company
  • 当前专利权人: FEI Company
  • 当前专利权人地址: US OR Hillsboro
  • 优先权: EP15156546.2 20150225
  • 主分类号: G01N1/28
  • IPC分类号: G01N1/28 H01J37/20 G01N1/42 H01J37/26
PREPARATION OF SAMPLE FOR CHARGED-PARTICLE MICROSCOPY
摘要:
A system for preparing a sample for study in a charged-particle microscope by: Providing a substantially planar sample holder having opposed faces substantially parallel to one another, comprising at least one aperture that connects said faces and across which a membrane has been mounted, which membrane comprises at least one perforation; Spanning a film of aqueous liquid across said perforation, which liquid comprises at least one study specimen suspended therein; Prior to said spanning step, placing a blotting sheet of blotting material in intimate contact with a first surface of said membrane, at a side distal from said sample holder; Depositing said aqueous liquid through said aperture and onto a second surface of said membrane, opposite said first surface; and Subsequently removing said blotting sheet from said membrane.
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